User Fee
Equipment | Hourly fee $ for Stevens Users (1 hour minimum) | Hourly fee $ for External Users | Note |
Mask aligner (MA6) | 50 | 100 |
|
PVD | 50 (excluding pumping time) | 100 (excluding pumping time) | user brings crucibles/targets |
DRIE | 100 | 200 |
|
ICP etcher | 100 | 200 |
|
XeF2 etcher | 50 | 100 |
|
Nanoimprintor | 50 | 100 | user brings mold photoresists |
Probe station | 50 | 100 |
|
O2 Plasma | 50 | 100 |
|
Spin coater, oven, hot plates, hood | 50 (exempted if using with MA6 or etchers) | 100 (exempted if using with MA6 or etchers) | user brings photoresists/developers |
SEM | 50 | 100 |
|
AFM | 50 | 100 | user brings AFM tips |
Equipment training | 200 | 300 |
|
Equipment operated by staff | 100 + equipment hourly fee | 100 + equipment hourly fee |
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