The multi-user MicroDevice Laboratory (MDL) is housed within an 800 square feet clean room at Stevens Institute of Technology.

Students at computer in the microdevice lab

Mission

The Micro Device Laboratory (MDL) is an Institute multiuser facility whose mission is to provide cutting edge nanofabrication and characterization facilities to support the research and educational programs of then Institute. It furthermore provides hands-on research opportunities for undergraduate and graduate students.

MicroDevice Lab Capabilities

Lithography

Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope

Device Testing

Probe station, SEM, AFM, SAXS, Microscope

Etch & Deposition

DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD