The multi-user MicroDevice Laboratory (MDL) is housed within an 800 square feet clean room at Stevens.
MicroDevice Lab Capabilities
Coupled micro-electro-mechanical-optical-fluidic analysis
Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope
Probe station, SEM, AFM, SAXS, Microscope
Etch & Deposition
DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD
MicroDevice Lab Director: EH Yang
EH Yang has extensive experience in developing micro- and nano-fabrication technologies, MEMS devices, and nanomaterials. Prior to Stevens, he was a Senior Member of the Engineering Staff at NASA’s Jet Propulsion Laboratory, responsible for obtaining funding from NRO, DARPA and NASA.