MicroDevice Lab
The multi-user MicroDevice Laboratory (MDL) is housed within an 800 square feet clean room at Stevens.
Mission
The Micro Device Laboratory (MDL) is an Institute multiuser facility whose mission is to provide cutting edge nanofabrication and characterization facilities to support the research and educational programs of then Institute. It furthermore provides hands-on research opportunities for undergraduate and graduate students.
MicroDevice Lab Capabilities
Device Design
Coupled micro-electro-mechanical-optical-fluidic analysis
Lithography
Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope
Device Testing
Probe station, SEM, AFM, SAXS, Microscope
Etch & Deposition
DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD
MicroDevice Lab Director: EH Yang
EH Yang has extensive experience in developing micro- and nano-fabrication technologies, MEMS devices, and nanomaterials. Prior to Stevens, he was a Senior Member of the Engineering Staff at NASA’s Jet Propulsion Laboratory, responsible for obtaining funding from NRO, DARPA and NASA.
