The multi-user MicroDevice Laboratory (MDL) is housed within an 800 square feet clean room at Stevens.

Students at computer in the microdevice lab


The Micro Device Laboratory (MDL) is an Institute multiuser facility whose mission is to provide cutting edge nanofabrication and characterization facilities to support the research and educational programs of then Institute. It furthermore provides hands-on research opportunities for undergraduate and graduate students.

MicroDevice Lab Capabilities

Device Design

Coupled micro-electro-mechanical-optical-fluidic analysis


Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope

Device Testing

Probe station, SEM, AFM, SAXS, Microscope

Etch & Deposition

DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD

MicroDevice Lab Director: EH Yang 

EH Yang has extensive experience in developing micro- and nano-fabrication technologies, MEMS devices, and nanomaterials. Prior to Stevens, he was a Senior Member of the Engineering Staff at NASA’s Jet Propulsion Laboratory, responsible for obtaining funding from NRO, DARPA and NASA. 

Read more about EH Yang