The multi-user MicroDevice Laboratory (MDL) is housed within an 800 square feet clean room at Stevens Institute of Technology.
The Micro Device Laboratory (MDL) is an Institute multiuser facility whose mission is to provide cutting edge nanofabrication and characterization facilities to support the research and educational programs of then Institute. It furthermore provides hands-on research opportunities for undergraduate and graduate students.
MicroDevice Lab Capabilities
Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope
Probe station, SEM, AFM, SAXS, Microscope
Etch & Deposition
DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD