MicroDevice Laboratory

The following pieces of equipment will be available within the facility: 

A complete lithography system including Mask Aligner (Karl Suss MA6), Nanoimprintor (Nanonex), Spin Coater/Drier (Headway Research), Solvent Bench (Clean Air Products), Wet Etch Bench (Clean Air Products), Laminar Hood, Hotplate System (Alpha Multiservices), Ovens (Alpha Multiservices), and Surface treatment (O2 plasma) are available.

For characterization, Environmental Scanning Electron Microscope (SEM, FEI) is also available.

For deposition, Physical Vapor Deposition (PVD, Denton Vacuum), Thermal Evaporator (Ladd Research), Sputter Coater (Pelco), and Molecular Vapor Deposition (Applied MST) are installed. In addition, Deep Reactive Ion Etcher (DRIE, BMRTek), XeF2 Etcher (Xactix), and Inductively Coupled Plasma Etcher (ICP, BMRTek) are available along with other testing equipment such as Microscope (Nikon) and Probe Station (Signatone).

Lithography

• Hot plate

• Convection oven: Barnstead Lab-Line class 100 clean room oven

• Spin coater: Headway Research PWM32-PS-R790

• Mask aligner: Karl Suss Microtec MA6/BA6

• Wet bench: Clean Air Products 

• Nanoimprintor: Nanonex NX-1000

Wet Etching

• Wet bench: Clean Air Products

Dry Etching

• XeF2 etcher: XACTIX Xetch e1

• Deep reactive ion etcher (DRIE): BMR Technology DSE200 

Deposition

• Thermal evaporator: LADD Research filament evaporator

• Physical vapor deposition (PVD): Denton Vacuum Explorer 14 

• Molecular vapor deposition (MVD): Applied MST

• Deep Silicon Etcher

• Inductively coupled plasma etcher (ICP): BMR Technology HiEtch ICP-etcher module 

Characterization

• Microscope

• Scanning electron microscope (SEM): Quanta FEG 450 (High Vac, Low Vac, ESEM modes)

• Probe station: Semiprobe Semiconductor characterization system: Keithley 4200

MDL Equipment Overview

• MicroDevice Lab Safety Policy 

  The MDL management has implemented all reasonable measures to ensure that this cleanroom provides a safe and clean working environment. It is the responsibility of all users, guests and staff to act in a professional, courteous, and safe manner at all times while in the facility. Users violating the operating and safety rules of the facility or endangering the safety of them or other users will be denied further access to the laboratory at the sole discretion of the management.

• MDL Safety Test 

• Chemical Safety

• PTC Proposal
  

• Advisor Permission Form 

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• MVD from Applied Microstructures

• PVD from Denton Vacuum

• XeF Etcher from Xactix

• Nanoimprintor from Nanonex

• SEM from FEI

• DRIE and ICP from BMRTek