Equipment

Hourly fee $ for Stevens Users (1 hour minimum)

Hourly fee $ for External Users 

Note

Mask aligner (MA6)

50

100

 

PVD

50 (excluding pumping time)

100 (excluding pumping time)

user brings crucibles/targets

DRIE

100

200

 

ICP etcher

100

200

 

XeF2 etcher

50

100

 

Nanoimprintor

50

100

user brings mold photoresists

Probe station

50

100

 

O2 Plasma

50

100

 

Spin coater, oven, hot plates, hood

50 (exempted if using with MA6 or etchers)

100 (exempted if using with MA6 or etchers)

user brings photoresists/developers

SEM

50

100

 

AFM

50

100

user brings AFM tips

Equipment training

200

300

 

Equipment operated by staff

100 + equipment hourly fee

100 + equipment hourly fee