faculty-profile

Dr. Eui-Hyeok Yang

PROFESSOR
Building: Carnegie
Room: 206
Phone: 201.216.5574
Fax: 201.216.8315
Email: eyang@stevens.edu
Website
School:  Schaefer School of Engineering & Science
Department:  Mechanical Engineering
Program:  Nanotechnology / Mechanical Engineering
Laboratory:  Micro Device Laboratory / Nanoelectronics & Nanomechatronics Lab
Education
  • Caltech Postdoctoral Scholar at JPL: Caltech/Jet Propulsion Laboratory: 1999 – 2000
  • Postdoctoral Scholar: Institute of Industrial Science (IIS), University of Tokyo, Japan: 1996 – 1998
  • Ph.D: Electrical Engineering, Ajou University, Korea (1996).
  • M.S, B.S: Control Engineering, Ajou University, Korea (1992, 1990).
Research
  • Nanofabrication, growth, device physics and applications of nanomaterials including graphene and other 1D and 2D atomic layers
  • Tunable wetting of conjugated polymers for LOC and biomedical applications
  • Nanofabrication of flexible devices and energy applications
General Information

 

Experience

Prior to Stevens, Dr. Yang was a Senior Member of the Engineering Staff at NASA’s Jet Propulsion Laboratory (JPL). At JPL, he was responsible for obtaining competitive research funding from National Reconnaissance Office, DARPA and NASA. He received a number of awards including the prestigious Lew Allen Award for Excellence at JPL in 2003, in recognition of his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. 

Since joining Stevens in August 2006, he has established internationally recognized research programs focused on smart polymer-based digital microfluidics, and graphene and carbon nanotube-based sensors and energy storage nanostructures.

Peers have recognized his scholarly leadership. Examples of these efforts include being appointed as an Associate Editor and/or Editorial Board of several journals including IEEE Sensors Journal, and being elected as Division Chair of ASME MEMS Division.

As Principal Investigator he has been responsible for obtaining extremely competitive research funding from several federal agencies including NSF, AFOSR, US Army, NRO, NASA and DARPA (including 6 NSF, 3 AFOSR, 5 NASA and 3 NRO grants or contracts).

Institutional Service
  • Research and Entrepreneurship Committee (Spring 2013 – current: Chair from 2015)
  • MDL Technical Committee (2007 - current)
  • Undergraduate Promotions Committee (2009 – 2010)
  • Faculty Academic Entrepreneurship Task Force  (2010 – 2012)
  • Freshman Faculty Advisor (2008 - current)
  • Graduate Students Faculty Advisor (2007 - current)
  • Mechanical Engineering Research Committee (2010 – 2012)
  • Mechanical Engineering Communications Committee (2010 – 2011) 
Professional Service
  • Chair, ASME MEMS Division, 2013 - 2014
  • Member of Executive Committee, ASME MEMS Division, 2010 - current
  • Chair of Program and Editorial Committee, ASME MEMS Division, 2009 – 2010
  • Track Chair, Micro and Nano Materials, Devices and Systems Track, International Mechanical Engineering Congress and Exposition (IMECE) 2009-2011: Micro and Nano Systems Track consists of approximately 50 sessions and over 200 presentations related to advances in Nano and Micro Systems
  • Track Co-Chair, Micro and Nano Materials, Devices and Systems Track, International Mechanical Engineering Congress and Exposition (IMECE) 2012
  • Track Co-Chair, Nanoengineering for Medicine and Biology Track, International Mechanical Engineering Congress and Exposition (IMECE) 2011
  • Committee Member, ASME Society-Wide Micro/Nano Poster Forum, IMECE, 2009-2012
  • Topic Organizer, Micro and Nano Devices Topic/Symposium, IMECE, 2005-2011
  • Chair of Organizing Committee, Metro Area MEMS/NEMS Workshop: Nanomanufacturing, 2007, 2010
  • Member of Technical Program Committee: SPIE Defense and Security Symposium (MEMS and Nanotechnology) 2008-2011; IEEE Sensors Conference, 2007-2009; SPIE MOEMS Conference 2004-2006

 

Consulting Service
  • NASA Goddard Space Center
  • TRS Technologies., Inc.
Innovation and Entrepreneurship

Mentor: I&E Summer Scholars, Stevens Scholars Program

Honors & Awards
  • Lew Allen Award for Excellence (2003), JPL:
    • Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for high-pressure, low leak-rate microvalves, deformable mirrors and inchworm devices for large aperture, space-based telescopes.
  •  NASA ICB Space Act Award (2005)
  •  Level C Award (2003)
  •  NASA ICB Space Act Award (2003)
  •  Level B Award (2001)
  •  Class 1 NASA Tech Brief Awards (29 awards), JPL
  •  Research Fellowship of the Japan Society for the Promotion of Science (1996-1998), The University of Tokyo, Japan
  •  Summa Cum Laude Honor (1990), Ajou University, Korea
Appointments
  • Professor: Stevens Institute of Technology, 2014 –
  • Associate Professor (Tenured): Stevens Institute of Technology, 2012 – 2014
  • Associate Professor (Tenure-track): Stevens Institute of Technology, 2006 – 2012
  • Senior Member of Engineering Staff: NASA Jet Propulsion Laboratory, 2002 - 2006
  • Member of Engineering Staff: NASA Jet Propulsion Laboratory, 2001 - 2002

 

  • Associate Editor, IEEE Sensors Journal, 2008 - current
  • Associate Editor, Nanosci. and Nantech. Lett., 2010 - current
  • Director, multi-user Micro Device Laboratory, 2008 - current
  • Division Chair, ASME MEMS Division, 2013 - 2014
  • Task Manager: MEMS deformable mirror, microvalve, linear motor at NASA Jet Propulsion Laboratory, 2002 - 2006
  • Technical Monitor at NASA Jet Propulsion Laboratory: NASA SBIR project, 2002 - 2006
  • Research Advisor at NASA Jet Propulsion Laboratory: National Research Councel, 2002 - 2006
  • Task Manager: MEMS microvalve at NASA Jet Propulsion Laboratory, 2001 - 2002
Professional Societies
  • IEEE - Senior Member, Associate Editor and Member of Editorial Board, Member of Technical Program Committee
  • ASME - Member, Member of Executive Committee, Track Chair, Symposium Organizer 
  • SPIE - Member of Technical Program Committee, Session Chair and Organizer 
 
Grants, Contracts & Funds

Approximately $7M as PI

  • Air Force Office of Scientific Research, Title: Wavelength-Tunable IR Detector based on Suspended Bilayer Graphene Micro Ribbons: PI, (July 2012~June 2015) (FA9550-12-1-0326)
  • NSF: Tunable Wetting on Smart Polymers for Ultra-Low Voltage Digital Microfluidics, PI, (June 2012~May 2015) (ECCS-1202269)
  • NSF: Bandgap-Tunable Graphene Nanoribbons for High Speed, Ultra-Wide-Band Photodetectors, PI (August 2011~July 2014) (ECCS-1104870)
  • NSF NUE: Nanotechnology EXposure for Undergraduate Students (NUE-NEXUS), PI  (Sept. 2011~August 2013) (EEC-1138244)
  • Air Force Office of Scientific Research: Instrumentation for Atomic Lattice Imaging of Graphitic Materials for Advanced Nanoelectronics and Nanosensing Systems, PI (June 2011~May 2013) (FA9550-11-1-0272)
  • NSF Major Research Instrumentation: Acquisition of a Nanoimprint Lithography System for Nanoscience Research and Education based on Low-Dimensional Materials, PI (Jan. 2011~Dec. 2012) (ECCS-1040007)
  • NASA GSFC IRAD: Ultra-Low Leak Rate Piezoelectrically Actuated Microvalves for Controlled Sampling by Mass Spectrometers Stevens PI (Nov 2010 - Oct 2011) IRAD: Graphene as Transparent Conductive Electrodes for High Density Focal Plane Assemblies Stevens PI(Nov 2010 - Oct 2011)
  • US Army, Armament Research Development & Engineering Center: Carbon-based Electron Wave Interferometer for Chip-Scale Gyroscopes for Guided, Gun Launched Munitions and Missiles, PI (Sept. 2009~Oct. 2011) (W15QKN-05-D-0011)
  • NSF Major Research Instrumentation: Acquisition of an Inductively Coupled Plasma (ICP) Etching System for Nano/Micro Device Fabrication (Sept. 2008~Aug. 2010) (ECCS-0821606)
  • NASA SBIR Phase II, Title: Micromachined Piezoelectric Multi-layer Actuators for Cryogenic adaptive Optics: Stevens PI (Jan 2009~Dec 2011) Phase I, Title: Micromachined Piezoelectric Multi-layer Actuators for Cryogenic adaptive Optics: Stevens PI (Jan 2008~June 2008) (NASA Contract No.NNX09CA83C)1
  • Air Force Office of Scientific Research, Title: Ultra-High-Speed Single Electron Memory Devices based on Carbon Nanotube Quantum Dots: PI (March 2008~Jan. 2011) (FA9550-08-1-0134)
  • DARPA TTO
  • National Reconnaissance Office, Director’s Innovation Initiatives
  • NASA NRA, Astrobiology Science and Technology Instrument Development
  • NASA Code R Enabling Concepts and Technologies (ECT) Program
  • Caltech President Funding
  • Center for Adaptive Optics
  • NASA Cross Enterprise Technology Development Program
Patents & Inventions
  1. Y. Kim, K. Kumar and F. Fisher, and E. H. Yang, "Popcorn-like Growth of Graphene-CNT 3D Multi-stack Architecture for Energy Storage Applications," U.S. Patent Application Serial No. 14/019,799
  2. W. Xu, X. Li, H. Bisaria, Y. Tian, C.-H. Choi and E. H. Yang, “Smart Polymer Meshes with Bi-Directionally Switchable Wetting Properties towards Tunable and Recyclable Oil/Water Separation,” Provisional Patent. US 61/766,304, Filed 2/19/2013
  3. V. Patil, Y. Kim and E. H. Yang, "High-Throughput Graphene Printing and Selective Transfer Using a Localized Laser Heating Technique," Provisional Patent. US 61/766,956, Filed 2/20/2013
  4. Y. –T. Tsai, C.-H. Choi and  E. H. Yang, “Marangoni Stress-Driven Droplet Manipulation on Smart Polymers for Ultra-Low Voltage Digital Microfluidics," US Patent Pending: Patent application number: 20120248229
  5. V. Patil, S. Straufand E. H. Yang, "Active Bandgap Tuning of Materials for Tunable Photodetection Applications," US Patent Pending: Patent application number: 20120153119
  6. K. Kumar and E. H. Yang, “A High-throughput Local Oxidation Patterning Process,” US Patent Pending: Patent application number: 20100243472
  7. 7.     C. P. Search, S. Strauf and E. H. Yang, “Phase Coherent Solid State Electron Gyroscope Array,” US Patent Pending: Patent application number: 20110140088
  8. E. H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated Micropropulsion and Method for Operating the Same”, Currently under review by NASA
  9. E. H. Yang, D. Choi, S. Bae, and C. Ramsey, “Fabrication of Copper Nanotubes by Electrochemical Deposition, and Copper Nanotubes Made Therefrom,” NASA Case No. NPO-42261-1: Government Owned Invention filed by NASA
  10. E. H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane for Active Optical Systems” US 7,336,412 B2 US Patent
  11. E. H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” US 7,268,081  US Patent
  12. W. Fink, E. H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Optically Powered And Optically Data-Transmitting Wireless Intraocular Pressure Sensor Device,” US 7,131,945 B2 US Patent
  13. E. H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 B2  US Patent
Selected Publications
Journals
  1. V. Patil, A. Capone, S. Strauf and E. H. Yang. (Sep 2013). "Improved Photoresponse with Enhanced Photoelectric Contribution in Fully Suspended CVD Graphene Photodetectors", Scientific Reports, (3), 2791.  Download  (563 kb PDF).
  2. K. Kumar, Y.-S. Kim, X. Li, Xin, J. Ding, F. T. Fisher, E. H. Yang. (Sep 2013). "Chemical Vapor Deposition of Carbon Nanotubes on Monolayer Graphene Substrates: Reduced Etching via Suppressed Catalytic Hydrogenation using C2H4", Chemistry of Materials,  Download  (1579 kb PDF).
  3. K. Kumar and E. H. Yang. (Sep 2013). "On the Growth Mode of Two-lobe Curvilinear Graphene Domains at Atmospheric Pressure", Scientific Reports, (3), 2571.  Download  (1513 kb PDF).
  4. K. Kumar, K. Kim and E. H. Yang. (Sep 20, 2013). "The Influence of Thermal Annealing to Remove Polymeric Residue on the Electronic Doping and Morphological Characteristics of Graphene", Carbon, (65), 35.  Download  (1721 kb PDF).
  5. Y.-T. Tsai, C.-H. Choi, and E. H. Yang. (2013). "Low-Voltage Manipulation of an Aqueous Droplet in a Microchannel via Tunable Wetting on PPy(DBS)", Lab Chip, RSC. (13), 302.  Download  (978 kb PDF).
  6. Y. Kim, K. Kumar, F. Fisher and E. H. Yang. (2012). "Out-of-Plane Growth of CNTs on Graphene for Supercapacitor Applications", Nanotechnology, Featured in the exclusive Highlight 2012 collection . (23), 015301.  Download  (773 kb PDF).
  7. M. Begliarbekov, K. Sasaki, O. Sul, E. H. Yang, and S. Strauf. (2011). "Optical Control of Edge Chirality in Graphene", Nano Letters, (11), 4874-4878.  Download  (2251 kb PDF).
  8. K. Kumar, O. Sul, S. Strauf, F. Fisher, D. S. Choi, M. G. Prasad, and E. H. Yang. (Jul 2011). "A Study on Nanoscale Carbon Nanotube Local Oxidation Lithography using an Atomic Force Microscope", IEEE Trans. Nanotechnology (TNANO), 10 (4), 849-854.  Download  (556 kb PDF).
  9. Y. Tsai, C.-H. Choi, N. Gao and E. H. Yang. (2011). "Tunable Wetting Mechanism of Polypyrrole Surfaces and Low-Voltage Droplet Manipulation via Redox", Langmuir, 27 (7), 4249-4256.  Download  (3349 kb PDF).
  10. O.Sul, S. Jang and E. H. Yang. (2011). "Determination of Mechanical Properties and Actuation Behaviors of Polypyrrole-Copper Bimorph Nanoactuators", IEEE Trans. Nanotechnology (TNANO), 10 (5), 985-990.  Download  (643 kb PDF).
  11. M. Begliarbekov, O. Sul, J. Santanello, N. Ai, X. Zhang, E.H. Yang, and S. Strauf. (2011). "Localized States and Resultant Band Bending in Graphene Antidot Superlattices", Nano Letters, 11 (3), 1254.  Download  (4959 kb PDF).
  12. W. Xu, R. Leeladhar, Y.-T. Tsai, E. H. Yang, and C.-H. Choi. (2011). "Evaporative Self-Assembly of Nanowires on Superhydrophobic Surfaces of Nano-Tip Latching Structures", Applied Physics Letters, (98), 073101.  Download  (970 kb PDF).
  13. Y.-T. Tsai, W. Xu, E.H. Yang and C.-H. Choi. (Jun 2010). "Self-Assembly of Nanowires at Three-Phase Contact Lines on Superhydrophobic Surfaces", Nanoscience and Nanotechnology Letters, 2 (2), 150.  Download  (10975 kb PDF).
  14. E. H. Yang. (Nov 2010). "Engineered Low-Dimensional Nanomaterials for Sensors, Actuators and Electronics", Reliability Special II, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), 04 (9), 041103.
  15. K. Kumar, S. Strauf, and E.H. Yang. (Jun 2010). "A Systematic Study of Graphite Local Oxidation Lithography Parameters Using an Atomic Force Microscope", Nanoscience and Nanotechnology Letters, 2 (2), 185.  Download  (2150 kb PDF).
  16. M. Begliarbekov, O. Sul, N. Ai, E. H. Yang, S. Strauf. (2010). "Aperiodic conductivity oscillations in quasi-ballistic graphene heterojunctions", Applied Physics Letters, (97), 122106.  Download  (173 kb PDF).
  17. D. S. Choi, J.-R. Park, S. Lee, T. Hahn, N. Presser, M. Leung, G. Stupian, E. H. Yang, and F Khalid. (Feb 2010). "On-chip Microcapacitors based on Electrochemically Grown Vertical Arrays of Gold Nanowire as Electrodes", Thin Solid Films doi:10.1016/j.tsf.2010.03.009.
  18. M. Begliarbekov, O. Sul, S. Kalliakos, E. H. Yang, S. Strauf. (2010). "Determination of Edge Purity in Bilayer Graphene Using micro-Raman Spectrosopy", Applied Physics Letters, 97 031908.  Download  (425 kb PDF).
  19. N. Gao, H. Wang and E. H Yang. (Jan 2010). "An Experimental Study on Ferromagnetic Nickel Nanowires Functionalized with Antibody for Cell Separation", Nanotechnology. 21 105107.  Download  (1119 kb PDF).
  20. O.Sul, S. Jang and E. H. Yang. (2009). "Step-Edge Calibration of Torsional Sensitivity for Lateral Force Microscopy", Measurement Science and Technology. 20 115104.  Download  (598 kb PDF).
  21. N. Ai, O. Sul, M. Begliarbekov, Q. Song, K. Kumar, D. S. Choi, E. H. Yang, S. Strauf. (Jun 2010). "Transconductance and Coulomb blockade properties of in-plane grown carbon nanotube field effect transistors", Nanoscience and Nanotechnology Letters, 2 (2), 73-78.  Download  (962 kb PDF).
  22. D. S. Choi, V. Fucsko, E. H. Yang., J.-R. Park, F. Khalid and Y.-K. Kim. (2009). "Vertical Arrays of Copper Nanotube Grown on Silicon Substrate by CMOS Compatible Electrochemical Process for IC Packaging Applications", Journal of Microelectronics and Electronic Packaging. 6 (3).
  23. S. W. Lee, S. S. Lee and E. H. Yang. (2009). "A Study on Field Emission Characteristics of Planar Graphene Sheets", Nanoscale Research Letters, 4 1218.  Download  (335 kb PDF).
  24. D.S. Choi and E. H. Yang. (2009). "Fabrication of Buried Nanochannels by Transferring", Journal of Sensors and Materials, 21 (6), 315-319.  Download  (1923 kb PDF).
  25. K.Shcheglov, X. Jiang, R. Toda, Z. Chang, and E. H. Yang. (2009). "Hybrid Linear Microactuators and Their Control Models for Mirror Shape Correction", Journal of Micro-Nano Mechatronics, 4 159-167.  Download  (2599 kb PDF).
  26. O. Sul ad E. H. Yang. (2009). "A Multi-Walled Carbon Nanotube-Aluminum Bimorph Nanoactuator", Nanotechnology, 20 095502.  Download  (654 kb PDF).
  27. Y. Rheem, C. Hangarter, E.-H. Yang, N. V. Myung, and B. Yoo. (2008). "Site-Specific Magnetic Assembly of Ferromagnetic Nanowire", IEEE Transactions on Nanotechnology, 7 251-255.  Download  (350 kb PDF).
  28. R. Toda and E. H. Yang. (2007). "Normally-Latched, Large-Stroke, Inchworm Microactuatorv", Journal of Micromechanics and Microengineering, 17 1715-1720.  Download  (913 kb PDF).
  29. C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung. (2007). "Hierarchical Magnetic Assembly of Nanowires", IOP Nanotechnology, Most accessed articles in Nanotechnology, Cover issue. 18 (20), 205-305.  Download  (839 kb PDF).
  30. E. H. Yang, C. Lee and J. Khodadadi. (2007). "Development of MEMS-Based Piezoelectric Microvalve Technologies Fabrication, Characterization and Modeling", Journal of Sensors and Materials, Special Issue on Microvalve, Invited paper. 19 1-18.
  31. C. A. Johnson, J. M. Khodadadi and E. H. Yang,. (2006). "Modeling of Frictional Gas Flow Effects in a Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions", Journal of Micromechanics and Microengineering, 16 2771-2782.  Download  (973 kb PDF).
  32. E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine. (Oct 2006). "Thin-Film Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane", IEEE/ASME Journal of Microelectromechanical Systems, 15 (5), 1214-1225.  Download  (3505 kb PDF).
  33. C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi. (Jun 2006). "Fabrication, Characterization and Computational Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,", IEEE/ASME Journal of Microelectromechanical Systems, 15 (3), 686-696.  Download  (6849 kb PDF).
  34. Y. Hishinuma and E. H. Yang. (Apr 2006). "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror", IEEE/ASME Journal of Microelectromechanical Systems, 15 (2), 370-379.  Download  (1775 kb PDF).
  35. E. H. Yang, C. S. Lee, J. Mueller and T. George. (Oct 2004). "Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion", IEEE/ASME Journal of Microelectromechanical Systems, 13 (5), 799-807.  Download  (1292 kb PDF).
  36. E. H. Yang and D. V. Wiberg. (Dec 2003). "A Wafer-Scale Membrane Transfer Process for the Fabrication of Optical Quality, Large Continuous Membranes", IEEE/ASME Journal of Microelectromechanical Systems, 12 (6), 804-815.  Download  (1966 kb PDF).
  37. C. Lee, E. H. Yang, N.V. Myung, and T. George. (Oct 2003). "A Nanochannel Fabrication Technology without Nanolithography", ACS NanoLetters, 3 (10), 1339-1340.  Download  (84 kb PDF).
  38. J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke. (2003). "An Overview of MEMS-Based Micropropulsion Developments at JPL", Acta Astronautica, 52 (9-12), 881-895.  Download  (1924 kb PDF).
  39. E. H. Yang and H. Fujita. (Mar 1999). "Reshaping of Single Crystal Silicon Microstructures", Japanese Journal of Applied Physics, Part 1, 38 (3A), 1580-1583.  Download  (182 kb PDF).
  40. E. H. Yang and H. Fujita. (1998). "Determination of the Modification of Young's Modulus due to Joule Heating of Microstructures Using U-Shaped Beams", Sensors and Actuators A, 70 185-190.  Download  (553 kb PDF).
  41. E. H. Yang, S. S. Yang and O. C. Jeong. (Apr 1998). "Fabrication and Electrostatic Actuation of Thin Diaphragms", KSME International Journal, 12 161-169.
  42. E. H. Yang, S. W. Han and S. S. Yang. (1996). "Fabrication and Testing of a Pair of Passive Bivalvular Microvalves Composed of p+ Silicon Diaphragms", Sensors and Actuators A, 57 75-78.  Download  (260 kb PDF).
  43. E. H. Yang and S. S. Yang. (Jun 1996). "The Quantitative Determination of the Residual Stress Profile in Oxidized p+ Silicon Films", Sensors and Actuators A, 54 684-686.  Download  (377 kb PDF).
  44. E. H. Yang, S. S. Yang, S. W. Han and S. Y. Kim. (Dec 1995). "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms", Sensors and Actuators A, 50 151-156.  Download  (602 kb PDF).
  45. E. H. Yang, S. S. Yang and S. H. Yoo. (Aug 1995). "A Technique for Quantitative Determination of the Profile of the Residual Stress along the Depth of p+ Silicon Films", Appl. Phys. Lett., 67 (14), 912-914.  Download  (218 kb PDF).
Presentation/Meeting
  1. E. H. Yang. (Oct 2013). "Utilization of Large-Area Graphene/CNT Architectures in Photonic and En-ergy Storage Applications", International Conference and Exhibition on Laser, Optics and Photonics, San Antonio, TX, Keynote Lecture.
  2. E. H. Yang. (Sep 2013). "Polymer-based Microfluidics", Smart Lab-on-a-Chip World Con-gress, San Diego, CA, Invited Lecture.
  3. E. H. Yang. (Aug 2013). "Nanoengineered Tunable Carbon Surfaces", UKC 2013, Newark, NJ, Invited Presentation.
  4. E. H. Yang. (Nov 2011). "Graphene-based Nano-Opto-Electro-Mechanical Devices", International Mechanical Engineering Congress and Exposition, Denver, CO, Invited Presentation.
  5. E. H. Yang. (Jul 2011). "Carbon-based Nanotechnology for Sensors, Actuators and Electronics", ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK 11), Portland, OR, Track Plenary Lecture.
  6. K. Kumar, Y. Kim and E. H. Yang. (Aug 2011). "Graphene-CNT-Graphene Towards 3-D Multi-Stack Graphene-CNT Architectures for Supercapacitor Applications", MFG Workshop, Napa, CA.
  7. Y. Kim, K. Kumar and E. H. Yang. (May 2011). "Vertical Carbon Nanotube Arrays on Graphene for Supercapacitor Applications", Nature Graphene Conference, Boston, MA.
  8. M. Begliarbekov, O. Sul, J. Santanello, N. Ai, X. Zhang, E. H. Yang, and S. Strauf. (May 2011). "Localized States and Resultant Band Bending in Graphene Antidot Superlattices", Nature Graphene Conference, Boston, MA.
  9. M. Begliarbekov, O. Sul, C. Tsai, N. Ai, E. H. Yang and Stefan Strauf. (Apr 2010). "Observation of Klein Tunneling in Top-Gated Graphene Transistors", Maryland, MD. Graphene Week.
  10. K. Kumar, S. Strauf, and E. H. Yang. (Apr). "Nanoscale Graphene Lithography Using an Atomic Force Microscope", Maryland, MD. Graphene Week.
  11. O.Sul, M. Begliarbekov, C. Tsai, Y. Kim, V. Patel, S. Strauf, and E. H. Yang. (Apr 2010). "CVD-assisted Atomically Precision Cutting of Graphene Strips with Specific Boundaries", Maryland, MD. Graphene Week.
  12. P. A. Huang and E. H Yang. (Nov 2009). "MEMS Thruster System for CubeSat Orbital Maneuver Applications", ASME International Mechanical Engineering Congress and Exposition, Lake Buena Vista, FL, Invited Presentation.
  13. O. Sul, S. Jang and E. H. Yang. (Nov 2009). "Characterization of Thermomechanical Properties of Polypyrrole Nanowires", Lake Buena Vista, FL. ASME International Mechanical Engineering Congress and Exposition.
  14. S. W. Lee, S. S. Lee and E. H. Yang. (Nov 2009). "Field Emission from Graphene Structures for Vacuum Transistor Applications", Lake Buena Vista, FL. ASME International Mechanical Engineering Congress and Exposition.
  15. K. Kumar, O. Sul, Y. T. Tsai, S. Strauf, F. Fisher, D. S. Choi and E. H. Yang. (Nov 2009). "Nanoscale Graphene and Carbon Nanotube Lithography using an Atomic Force Microscope", Lake Buena Vista, FL . ASME International Mechanical Engineering Congress and Exposition.
  16. E. H. Yang, Ji Su, T.-B. Xu, R. Morgan, and Z. Chang. (Nov 2007). "Active Membrane Using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors", Seattle, Washington. ASME International Mechanical Engineering Congress and Exposition.
  17. J. Su, E. H. Yang, T. Xu, R. M. Morgan, Z. Chang. (Mar 18, 2007). "Active Membrane using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors", San Diego, California USA. SPIE Smart Structures and Materials and NDE for Health Monitoring and Diagnostics.
  18. E. H. Yang. (Jul 8-12, 2007). "Microfabricated Actuators for Space Applications", ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK '07), Keynote Talk.
  19. B. Yoo, Y. Rheem, C. Hangarter, E. H. Yang, and N. V. Myung. (Nov 2006). "Site-Specific Magnetic Assembly of Nanostructures for Sensor Arrays", Chicago, IL. ASME International Mechanical Engineering Congress and Exposition.
Conference Proceedings
  1. O. Sul, M. Begliarbekov, J. Santanello, N. Ai, X. Zhang, E. H. Yang, and S. Strauf. (Aug 24-26, 2011). "Fluorescene Quenching by Local Electronic States around Graphene Antidot Superlattices", Nano Korea Symposium, Kintex, Seoul, Republic of Korea.
  2. S. Strauf and E. H. Yang. (Apr 2011). "Graphene Optoelectronics based on Antidot Superlattices", Invited Paper, SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference, Orlando, FL.
  3. K. Kumar and E. H. Yang. (Jun 21-25, 2010). "Nanoscale Graphene Lithography Using an Atomic Force Microscope", TechConnect World Conference and Expo. Anaheim, California USA.
  4. Y. T. Tsai, C. H. Choi and E. H. Yang. (Jun 21-25, 2010). "Contact Angle Hysteresis of Droplet on a Wettability Switchable Surface", TechConnect World Conference and Expo . Anaheim, California USA.
  5. E. H. Yang. (Apr 2010). "Engineered Carbon Nanotubes and Graphene for Nanoelectronics and Nanomechanics", SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference, Orlando, FL. Invited Paper.
  6. E. H Yang. (Jan 2010). "Engineered Nanowires, Carbon Nanotubes and Graphene for Sensors, Actuators and Electronics", SPIE MEMS-MOEMS, San Francisco, CA. Invited paper.
  7. O.Sul, C. Tsai, N. Gao, and E. H Yang. (Nov 2009). "Preprogrammed Self-Arrangement of Multiple Individual Nano-Objects on a Substrate", m-TAS. Cheju, Korea.
  8. R. Leeladhar, W. Xu, Y-T. Tsai, E. H. Yang, and C-H. Choi. (Nov 2009). "Nanofluid Droplet Evaporation on Superhydrophobic Surfaces", m-TAS. Cheju, Korea.
  9. P. A. Huang and E. H Yang. (Apr 2009). "MEMS-based Warm Gas Thruster System for CubeSat Orbital Maneuver Applications", SPIE Defense and Security Symposium, Space Exploration Technologies II, Conference 7331 - Proceedings of SPIE, Orlando, FL USA. Invited Paper. 7331.
  10. Y. T. Tsai, W. Xu, E. H. Yang and C.H. Choi. (Nov 2008). "Interfacial-Tension-Directed Self-Assembly of Nanowires on a Superhydrophobic Surfaces", Boston, MA USA. ASME International Mechanical Engineering Congress and Exposition.
  11. H. J. Yoon, J. H. Yang, S. S. Yang, and E. H. Yang. (Nov 2008). "Microfabricated Nanowire Sorter for Nanowire Assembly", Boston, MA USA. ASME International Mechanical Engineering Congress and Exposition.
  12. D. S. Choi, V. Fucsko and E. H. Yang. (Apr 2008). "Copper Nanotubes for Packaging Applications", Big Sky, Montana USA. IEEE Aerospace Conference.
  13. O.Sul and E. H. Yang. (Nov 2008). "Development of Carbon Nanotube-Based Nanoactuator for Nano-Conveyer System", Boston, MA USA. ASME International Mechanical Engineering Congress and Exposition.
  14. E. H. Yang, Ji Su, T.-B. Xu, R. Morgan, and Z. Chang. (Nov 2007). "Active Membrane Using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors", ASME International Mechanical Engineering Congress and Exposition. Seattle, Washington.
  15. E. H. Yang. (Jul 8, 2007). "Microfabricated Actuators for Space Applications", Keynote Speech, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK 07). Vancouver, Canada.
  16. E. H. Yang. (Apr 2007). "Microactuators for Wavefront Correction in Space", Invited Paper, SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Orlando, FL. 6556.
  17. R. Toda and E. H. Yang. (Jan 2006). "Zero-Power Latching, Large-stroke, High-precision Linear Microactuator for Lightweight Structures in Space", IEEE Micro Electro Mechanical Systems (MEMS) Conference. Istanbul, Turkey.
  18. H. Yu, Y. Tsai, H. Wang and E. H. Yang. (Apr 2008). "Internationalization of Gold and Nickel Nanowires by Living Cells", SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE. Orlando, FL.
  19. R. Toda and E. H. Yang. (Jul 17-22, 2005). "Development of Latching Type Large Vertical Travel Microactuator", ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK 05), San Francisco, USA.
  20. Y. Hishinuma and E. H. Yang. (Jun 2005). "Large Aperture Deformable Mirror with a Transferred Single-Crystal Silicon Membrane Actuated Using Large-Stroke PZT Unimorph Actuators", IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '05), Seoul, Korea.
  21. S. M. Saeidi, J. M. Khodadadi, C.A. Johnson, C. Lee and E. H. Yang. (May 8-12, 2005). "Computational Modeling of a Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate", 2005 NSTI Nanotechnology Conference and Trade Show, Nanotech 2005, Anaheim, California, U.S.A.
  22. R. Toda and E. H. Yang. (Jan 2005). "Fabrication and Characterization of Vertical Travel Linear Microactuator", SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA.
  23. Y. Hishinuma, E. H. Yang, Eric Bloemhof, and B. Martin Levine. (Jan 2005). "Piezoelectric Unimorph MEMS Deformable Mirror for Ultra-Large Telescopes", SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA.
  24. R. Toda and E. H. Yang. (Nov 13-19, 2004). "Fabrication and Characterization of Vertical Inchworm Microactuator", Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California.
  25. Y. Hishinuma, E. H. Yang, J. G. Cheng, and Susan Trolier-McKinstry. (Nov 13-19, 2004). "Optimized Design, Fabrication and Characterization of PZT Unimorph Microactuators for Large-Stroke, Continuous Membrane Deformable Mirrors", Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California.
  26. Y. Hishinuma and E. H. Yang. (Jun 6-10, 2004). "Single-Crystal Silicon Continuous Membrane Deformable Mirror with PZT Unimorph Microactuator Arrays", Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina.
  27. C. Lee and E. H. Yang. (Jun 6-10, 2004). "Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion", Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina.
  28. C. Lee, E. H. Yang, N.V. Myung, and T. George. (Oct 5-9, 2003). "A Nanochannel Fabrication Technology without Nanolithography", Micro-TAS Conference, Lake Tahoe, CA, USA.
  29. C. Lee, E. H. Yang, N.V. Myung, and T. George. (Aug 12-14, 2003). "A Nanochannel Fabrication Technique Using Chemical-Mechanical Polishing (CMP) and Thermal Oxidation", IEEE-Nano 2003, San Francisco, CA, USA.
  30. S. N. Gullapalli, E. H. Yang and S. S. Lih. (2003). "New Technologies for the Actuation and Control of Large Aperture Lightweight Optical Quality Mirrors", IEEE Aerospace Conference, Big Sky, Montana, USA.
  31. D. S. Choi and E. H. Yang. (Feb 23-27, 2003). "Fabrication of 20 nm Embedded Longitudinal Nanochannels by Etching Sacrificial Nanowires", Nanotechnology Conference and Trade Show, San Francisco, California, USA.
  32. E. H. Yang, C. Lee and J. Mueller. (Jan 2003). "Normally-Closed, Leak-Tight Piezoelectric Microvalve with Ultra-High Pressure Upstream Flow Control for Integrated Micropropulsion", IEEE International Conference on Microelectromechanical Systems (MEMS 03) Conference, Kyoto, Japan. 80-83.
  33. P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. Muller, S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang. (Jan 2003). "MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics", Invited Paper, SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA.
  34. E. H. Yang, R. Dekany and S. Padin. (Jan 2003). "Design and Fabrication of a Large Vertical Travel Silicon Inchworm Microactuator for Advanced Segmented Silicon Space Telescope (ASSiST)", SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA.
  35. E. H. Yang, K. Shcheglov and Susan Trolier-McKinstry. (Jan 2003). "Concept, Modeling and Fabrication Techniques for Large-Stroke Piezoelectric Unimorph Deformable Mirrors", SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA.
  36. E. H. Yang and C. Lee. (Nov 2002). "Piezoelectric Microvalves for Micropropulsion", ASME International Mechanical Engineering Congress and Exposition, Orlando, FL.
  37. E. H. Yang, N. Rohatgi and L. Wild. (Sep 9-12, 2002). "A Piezoelectric Microvalve for Micropropulsion", AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas.
  38. J. Mueller, C. Marrese, J. Ziemer, A. Green, M. Mojarradi, T. Johnson, E. H. Yang, V. White, D. Bame, R. Wirz, M. Tajmar, J. Schein, R. Reinicke, and V. Hruby. (Sep 9-12, 2002). "JPL Micro-Thrust Propulsion Activities", AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas.
  39. E. H. Yang, and K. Shcheglov. (Aug 22-28, 2002). "A Piezoelectric Bimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes", SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA.
  40. R. Dekany, D. McMartin, S. Padin, E. H. Yang and M. Troy. (Aug 22-28, 2002). "Advanced Segmented Silicon Space Telescopes (ASSiST)", SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA.
  41. E. H. Yang and D. V. Wiberg. (Nov 2001). "A Wafer Transfer Technology for MEMS Adaptive Optics", ASME International Mechanical Engineering Congress and Exposition, Novel Micromachining Processes and Packaging for MEMS, New York, New York.
  42. J. Mueller, E. H. Yang, A. Green, V. White, I. Chakraborty and R. Reinicke. (Oct 2001). "Design and Fabrication of MEMS-Based Micropropulsion Devices at JPL", Invited Paper, Reliability, Testing, and Characterization of MEMS/MOEMS, Proceedings of SPIE, San Francisco. 4558 57-71.
  43. J. Mueller, C. Marrese, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, and S. Vargo. (Apr 2-6, 2001). "An Overview of MEMS-Based Micropropulsion Developments at JPL", IAA-B3-1004, 3d International Symposium of the International Academy of Astronautics (IAA) for Small Satellites for Earth Observation, Berlin, Germany.
  44. T. George, Y. Bae, I. Chakraborty, H. Cherry, C. Evans, F. Eyre, A. Hui, K.King, L.Kim, R.Lawtona, G. Lin, C.Marreseb, J.Mueller, J.Podosek, K.Shcheglov, T.Tang, T.VanZandt, S.Vargo, J.Wellmana, V.White, D.Wiberg and E. H. Yang. (Jul 30, 2000). "MEMS Technology at NASA's Jet Propulsion Laboratory", Invited Paper, SPIE Intl Symp. Optical Science and Technology, San Diego.
  45. E. H. Yang and D. V. Wiberg. (Jan 2000). "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable Mirrors", IEEE International Conference on Microelectromechanical Systems (MEMS 01) Conference, Interlaken, Switzerland. 80-83.
  46. E. H. Yang, D. V. Wiberg, and Richard G Dekany. (Jul 30, 2000). "Design and Fabrication of Electrostatic Actuators with Corrugated Membranes for MEMS Deformable Mirror in Space", SPIE Intl Symp. Optical Science and Technology, Vol. 4091, San Diego. 83-89.
  47. P. Surbled, B. Le Pioufle, E. H. Yang, H. Fujita. (Jun 14-18, 1999). "Shape Memory Alloys for Micromembranes Actuation", Europto Series (EOS/SPIE symposia), Munich (D). 63-70.
  48. E. H. Yang and H. Fujita. (Sep 21-22, 1998). "Fabrication of Thin Film TiNi Shape Memory Alloy Microactuators for Optical Switching Applications", SPIE Micromachining and Microfabrication Conference, Microlectronic Structures and MEMS for Optical Processing IV. 3513.
  49. E. H. Yang and H. Fujita. (Sep 1997). "Reshaping of Single Crystalline Silicon Microstructures for 3D MEMS", Micro Mechanics Europe 97 (MME 97), Southampton, England. 67-70.
  50. E. H. Yang and H. Fujita. (Jun 1997). "Fabrication and Characterization of U-shaped Beams for the Determination of the Modification of Young's Modulus after Joule Heating of Polysilicon Microstructures", IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, USA. 603-606.
  51. E. H. Yang and H. Fujita. (Jun 1997). "Plastic Deformation of Single Crystalline Silicon Microstructures by Joule Heating", Sensor Symposium, Late News, Kawasaki, Japan. L73.
  52. Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang and H. Fujita. (Jan 1997). "Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology", IEEE International Conference on Microelectromechanical Systems (MEMS '97), Nagoya, Japan. 477-481.  Download  (466 kb PDF).
  53. E. H. Yang and H. Fujita. (Mar 1997). "Modification of Young's Modulus due to the Joule Heating of Polysilicon U-shaped Beams", IEEJ Annual Conference, Vol. 3, Kyoto, Japan. 247-248.
  54. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo. (Nov 1996). "Dynamic Characteristics of the Corrugated and the Flat p+ Diaphragms Actuated Electrostatically under Residual Stress)", International Mechanical Engineering Congress and Exposition (96 Winter Annual Meeting), Atlanta, U.S.A. . 59 441-445.
  55. E. H. Yang, S. S. Yang and S. H. Yoo. (Dec 1995). "Design and Fabrication of Electrostatic Microactuators with Silicon Diaphragms", Int. Workshop on Advanced Mechatronics, Cheju, Korea. 247-256.
  56. E. H. Yang, S. S. Yang, S. W. Han, and S. Y. Kim. (Nov 1995). "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms", IEEE Region 10 Conference on Microelectronics and VLSI, Hong Kong. 28-31.
  57. E. H. Yang and S. S. Yang. (Sep 1995). "Fabrication of an Electrostatic Micropump with p+ Diaphragms", Int. Symp. on Microsystems, Intelligent Materials and Robots, Sendai, Japan. 106-109.
  58. E. H. Yang and S. S. Yang. (Jun 1995). "A New Technique for Quantitative Determination of the Stress Profile along the Depth of p+ Silicon Films", IEEE Int. Conf. Solid-State Sensors and Actuators, (Transducers 95), Stockholm, Sweden. 68-71.
  59. S. S. Yang, E. H. Yang, S. Y. Kim, J. D. Seo, and S. H. Yoo. (Nov 1994). "Fabrication of an Electrostatic Actuator and Passive Valves with p+ Diaphragms for Micropumps", ASME Winter Annual Meeting, DSC-vol. 55-2, Chicago, U.S.A.. 733-740.
Courses
  • ME 483 Control Systems
  • ME 610 Advanced Topics in Mechanical Engineering
  • ME 581 Introduction to Bio Micro Electro Mechanical Systems (BioMEMS)
  • ME 681 Applications of Advanced Micro/Nano Materials, Structures and Devices
  • ME 682 Advanced Nanofabrication for Nanoelectronics
  • NANO 200 Intro to Nanotechnology
  • NANO 325 Introduction to Nanofabrication and Characterization