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Dr. Eui-Hyeok Yang

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Dr. Eui-Hyeok Yang
Associate Professor
School:  Schaefer School of Engineering & Science
Department:  Mechanical Engineering
Program:  Nanotechnology / Mechanical Engineering

Location:203 Carnegie
Phone:201.216.5574
Fax:201.216.8315
Email:eyang@stevens.edu
Courses:
ME 483 ME 610 ME 581
ME 681 ME 682  

Research & Education
Education
  • Caltech Postdoctoral Scholar at JPL: NASA Jet Propulsion Laboratory: 1999 – 2000
  • Postdoctoral Scholar: IIS, University of Tokyo, Japan: 1996 – 1998
  • Ph.D.: Control and Instrumentation Engineering, Ajou University, Korea (1996)
  • M.S: Control and Instrumentation Engineering, Ajou University, Korea
  • B.S: Control and Instrumentation Engineering, Ajou University, Korea
   
Research

Nanoelectronics, nanosensors and nanoactuators based on engineered nanomaterials including carbon nanotube and graphene: a) Carbon nanotube and graphene quantum dots for FET and SET nanoelectronics, gas/ion sensors and energy harvesting devices; b) High-throughput flash voltage-applied nanolithography process, and large-area graphene synthesis; and c) Nanoscale bimorph actuators for re-configurable arrayed-nanostructures for antennas, remote sensors and biomedical nanobots).

MEMS technology: a) Ultra-leak-tight microvalve technologies for NASA applications; Mirror transfer process for large-stroke deformable mirrors

Experience & Service
Professional Service
  • Associate Editor, IEEE Sensors Journal 
  • Track Chair, Micro and Nano Systems track, IMECE (International Mechanical Engineering Congress and Exposition)
  • Program Committee Chair, ASME MEMS Division
  • Chair, IMECE Technical Committee, and Fabrication Packaging and Materials Technical Committee, ASME MEMS Division
  • Technical Program Committee: IEEE Sensors Conference,  SPIE Defense and Security Symposium (MEMS and Nanotechnology), IEEE Sensors Conference,  SPIE Defense and Security Symposium (MEMS and Nanotechnology)  
  • Organizer and Session Chair: Micro and Nano Devices Symposium, ASME International Mechanical Engineering Congress and Exposition, 2005~present, The 1st Metro Area MEMS/NEMS workshop at Stevens Institute of Technology, 2007
  • Reviewer: Journals: IEEE Sensors Journal, IEEE/ASME Journal of Microelectromechanical Systems, IEEE EDS Electron Device Letters, IOP Journal of Physics: Condensed Matter, IOP Journal of Physics D: Applied Physics, IOP Journal of Micromechanics and Microengineering, IOP Nanotechnology, IOP Journal of Optics A: Pure and Applied Optics, IOP Measurement Scienece and Technology, Sensors and Actuators A, Micromechatronics, Journal of Sensors and Materials, Optics Communications, International Journal of Optomechatronics, Microfluidics and Nanofluidics; Conferences: IEEE Sensors Conference, ASME International Mechanical Engineering Congress and Exposition, SPIE MOEMS and MEMS Conference Proposals: NSF CAREER panels (Micro and Nano Systems, Biological and Chemical Separation), NASA SBIR Phase I and II, JPL Research and Technology Development, Ireland Science Foundation, Cooperative Grants Program (CGP)-A of the U.S. Civilian Research and Development Foundation (CRDF); ACS Petroleum Research Fund; Projects: Multi Object Spectrometer (MOS) for NASA’s James Webb Space Telescope (JWST)
   
Experience
  • Associate Professor: Stevens Institute of Technology: 2006 – Present
  • Senior Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: 2002 – 2006
  • Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: 2001 – 2002
General Information
Dr. Yang is the director of Micro Device Laboratory (MDL). He came from NASA's Jet Propulsion Laboratory, where he was a Senior Member of the Engineering Staff. In recognition of his excellence in advancing the use of MEMS-based actuators for space applications, he received the prestigious Lew Allen Award for Excellence at JPL. Dr. Yang is currently PI/Co-PI on grants from AFOSR, NSF, and NASA SBIR. He is Associate Editor of the IEEE Sensors Journal.
Appointments
  • Associate Editor, IEEE Sensors Journal
  • Director of Micro Device Laboratory at Stevens
Consulting Service
  • MEMS valve technology for Rexcorp
  • MEMS actuated membrane for POC
  • MEMS valve technology for NASA GSFC
  • MEMS deformable mirror for TRS Technologies, Inc
Institutional Service
  • ME Department Research Committee

  • Faculty Academic Entrepreneurship Task Force
  • Undergraduate Promotions Committee
  • Dissertation Committee: Kwang Jun Sohn, Ph.D: Parametric Tests for Multichannel Adaptive Signal Detection, 2007
Achievements & Professional Societies
Patents & Inventions
  1. E.H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated Micropropulsion and Method for Operating the Same”, Currently under review by NASA
  2. C. P. Search, S. Strauf and E.H. Yang, “Phase Coherent Solid State Electron Gyroscope Array,”  U.S. Provisional Patent filed
  3. N. Gao, H. Wang and E.H. Yang, “A highly efficient cell separation technique using antibody functionalized magnetic nanowires,” U.S. Provisional Patent Application filed
  4. O. Sul, R. Dutta, and E.H. Yang, “A Nanowire-based Ultra-High Frequency Diode for Solar Energy Harvesting,” U.S. Provisional Patent Application Filed:  5/14/2009, Serial # 61/216,200
  5. S. Lee and S. S. Lee, and E.H. Yang, “A Planner Vacuum Transistor Based on Graphene Field Emissions,” U.S. Provisional Patent Filed:  5/15/2009, Serial # 61/216,298
  6. K. Kumar and E.H. Yang, “A High-throughput Local Oxidation Patterning Process,”  U.S. Provisional Patent Filed: 3/27/2009, Serial # 61/164,101
  7. E.H. Yang, D. Choi, S. Bae, and C. Ramsey, “Fabrication of Copper Nanotubes by Electrochemical Deposition, and Copper Nanotubes Made Therefrom,” NASA Case No. NPO-42261-1: Government Owned Invention filed by NASA
  8. E.H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane for Active Optical Systems” US 7,336,412 B2 US Patent
  9. E.H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” US 7,268,081  US Patent
  10. W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Optically Powered And Optically Data-Transmitting Wireless Intraocular Pressure Sensor Device,” US 7,131,945 B2 US Patent
  11. E.H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 B2  US Patent
Honors & Awards
  • Lew Allen Award for Excellence (2004), JPL: Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for the development of high-pressure, low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for segmented mirror assembly and control for large aperture, space-based telescopes.
  • NASA ICB Space Act Award (2005), JPL
  • Level C Award (2003), JPL
  • NASA ICB Space Act Award (2003), JPL
  • Level B Award (2001), JPL
  • Class 1 NASA Tech Brief Awards (2001-Present), JPL (28 awards)
  • Research Fellowship of the Japan Society for the Promotion of Science (1996-1998), The University of Tokyo, Japan
  • Summa Cum Laude Honor (1990), Ajou University, Korea
   
Professional Societies
  • Senior Member: The Institute of Electronics and Electrical Engineers (IEEE): Conference Committee, Session Chair
  • American Society of Mechanical Engineers (ASME): Committee Chair, Symposium Chair, Organizer, Session Chair
  • The International Society for Optical Engineering (SPIE): Conference Committee, Session Chair
  • Member: Materials Research Society (MRS)
  • Member: Korean Institute of Electrical Engineering (KIEE)
Grants, Contracts & Funds
  • Air Force Office of Scientific Research
  • US Army ARDEC
  • National Science Foundation
  • NASA SBIR Phase I&II
  • JPL Research and Technology Development
  • DARPA TTO, Large Aperture Space Surveillance
  • National Reconnaissance Office, Director’s Innovation Initiatives
  • National Reconnaissance Office
  • NASA NRA, Astrobiology Science and Technology Instrument
    Development, Bio/nano Technology Program
  • JPL Director's Research and Development Fund
  • NASA Code R Enabling Concepts and Technologies Program
  • NASA Cross Enterprise Technology Development Program
  • NASA Gossamer Space Telescope Technology
  • Caltech President Funding
Selected Publications
Journals

  • S. W. Lee, S. S. Lee and E. H. Yang. (2009). "A Study on Field Emission Characteristics of Planar Graphene Sheets", Nanoscale Research Letters.


  • D.S. Choi and E. H. Yang. (2009). "Fabrication of Buried Nanochannels by Transferring", Journal of Sensors and Materials.


  • K.Shcheglov, X. Jiang, R. Toda, Z. Chang, and E. H. Yang. (2009). "Hybrid Linear Microactuators and Their Control Models for Mirror Shape Correction", Journal of Micro-Nano Mechatronics.


  • O. Sul ad E. H. Yang. (2009). "A Multi-Walled Carbon Nanotube-Aluminum Bimorph Nanoactuator", Nanotechnology, 20 095502.


  • Y. Rheem, C. Hangarter, E.-H. Yang, N. V. Myung, and B. Yoo. (2008). "Site-Specific Magnetic Assembly of Ferromagnetic Nanowire", IEEE Transactions on Nanotechnology, 7 251-255.


  • R. Toda and E. H. Yang. (2007). "Normally-Latched, Large-Stroke, Inchworm Microactuatorv", Journal of Micromechanics and Microengineering, 17 1715-1720.


  • C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung. (2007). "Hierarchical Magnetic Assembly of Nanowires", IOP Nanotechnology, Most accessed articles in Nanotechnology, Cover issue. 18 (20), 205-305.


  • E. H. Yang, C. Lee and J. Khodadadi. (2007). "Development of MEMS-Based Piezoelectric Microvalve Technologies – Fabrication, Characterization and Modeling,", Journal of Sensors and Materials, Special Issue on Microvalve, Invited paper. 19 1-18.


  • C. A. Johnson, J. M. Khodadadi and E. H. Yang,. (2006). "Modeling of Frictional Gas Flow Effects in a Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions", Journal of Micromechanics and Microengineering, 16 2771-2782.


  • E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine. (Oct 2006). "Thin-Film Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane", IEEE/ASME Journal of Microelectromechanical Systems, 15 (5), 1214-1225.


  • C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi. (Jun 2006). "Fabrication, Characterization and Computational Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,", IEEE/ASME Journal of Microelectromechanical Systems, 15 (3), 686-696.


  • Y. Hishinuma and E. H. Yang. (Apr 2006). "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror", IEEE/ASME Journal of Microelectromechanical Systems, 15 (2), 370-379.


  •    Conference Proceedings

  • E. H Yang, S. Strauf, F. Fisher, and D. S. Choi. (Apr 2009). "Carbon-based Nano Devices for Sensors, Actuators and Electronics", Invited Paper, SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL. 7318.


  • E. H. Yang. (Apr 2007). "Microactuators for Wavefront Correction in Space", Invited Paper, SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Orlando, FL. 6556.


  • Presentation/Meeting

  • P. A. Huang and E. H. Yang. (2009). "MEMS-based Warm Gas Thruster System for CubeSat Orbital Maneuver Applications", Invited Presentation, SPIE Defense and Security Symposium, Space Exploration Technologies II, Conference 7331 - Proceedings of SPIE Volume 7331, Orlando, FL.


  • E. H. Yang. (Jul 8-12, 2007). "Microfabricated Actuators for Space Applications", Keynote Talk, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK ’07), .


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