MicroDevice Lab

MDL Capabilities

Device Design

Coupled micro-electro-mechanical-optical-fluidic Analysis

Lithography

Mask aligner, Spin coater, Nanoimprintor, Bake ovens, Wet bench, Microscope

Device Testing

Probe station, SEM, AFM, SAXS, Microscope

Etch & Deposition

DRIE, ICP, XeF2 etcher, Wet etch bench, PVD, Thermal evaporator, MVD

 

WITH SUPPORT FROM: