MicroDevice Lab

MDL Capabilities

Device Design

Coupled micro-electro-mechanical-optical-fluidic analysis

Photolithography

Mask aligner, spin coater, bake ovens, wet bench, microscope

Device Testing

Probe station, Zyvex nanomanupulator, SEM, AFM, high-magnification microscope

Etch & Deposition

DRIE, XeF2 etcher, wet etch bench, PVD System, ICP Etcher

WITH SUPPORT FROM: