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| | Dr. Eui-Hyeok Yang | | Associate Professor | | Location: | 203 Carnegie | | Phone: | 201.216.5574 | | Fax: | 201.216.8315 | | Email: | eyang@stevens.edu |
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ME 483:Control Systems
Analysis and synthesis of feedback control systems to achieve specified stability and performance criteria, stability via root-locus techniques, Nyquist's criterion, Bode and Nichol's plots, effect of various control laws and pole-zero compensation on performance, applications to servomechanisms, hydraulic and pneumatic control systems, analysis of nonlinear systems. |
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ME 610:Advanced Topics in Mechanical Engineering
Courses on advanced topics of current interest in Mechanical Engineering, including but not limited to any of the following: steam turbines, random vibrations, stability of nonlinear mechanical systems, stress waves in solids, lubrication theory, radiative heat transfer, mechanism design, buckling of metal structures. |
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ME 581:Introduction to Bio Micro Electro Mechanical Systems (BioMEMS)
Bringing together the creative talents of electrical, mechanical, optical and chemical engineers, materials specialists, clinical-laboratory scientists, and physicians, the science of biomedical microelectromechanical systems (Bio MEMS) promises to deliver sensitive, selective, fast, low cost, less invasive, and more robust methods for diagnostics, individualized treatment, and novel drug delivery. The goals of this course are to introduce microfabrication, microfluidics, sensors, actuators, drug delivery systems, micro total analysis systems and lab-on-a-chip devices, detection and measurement systems. The main focus is on the fundamental challenges and limitations involved in designing and demonstrating BioMEMS devices. |
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ME 681:Applications of Advanced Micro/Nano Materials, Structures and Devices
The goals of this course are to go beyond the introduction stage in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) to provide students with a strong background in the design and characterization of micro- and nano-scale sensors and actuators with a broad range of applications in VNT-based sensors, actuators and devices, biomedical systems, micro- and nanoscale manipulation, adaptive optics, and microfluidics. The main focus is on the fundamental challenges and limitations involved in designing and demonstrating micro and nano devices and systems. Prerequisites: ME 573, ME 581 or equivalent. |
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ME 682:Advanced Nanofabrication for Nanoelectronics
This course will address the basic concepts of nanoelectronics, including fundamental principles, novel electronic materials, novel fabrication techniques and devices. In particular, it will focus on novel nanofabrication techniques including nanolithography, growth and assembly processes, and characterization techniques to validate its fabrication process related to the area of Nanoelectronics. It will also address the technical issues to develop nano-scale elements/devices including single electron devices, carbon nanotubes as interconnects or transistors, nanowires, graphene materials and devices, spintronic applications and eventually complex organic molecules as memory and logic units. |
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| | School: Schaefer School of Engineering & Science | | Department: Mechanical Engineering | Program: Nanotechnology / Mechanical Engineering
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| | Research & Education |  |
| | Education | Caltech Postdoctoral Scholar at JPL: NASA Jet Propulsion Laboratory: 1999 – 2000 Postdoctoral Scholar: IIS, University of Tokyo, Japan: 1996 – 1998 - Ph.D.: Control and Instrumentation Engineering, Ajou University, Korea (1996)
- M.S: Control and Instrumentation Engineering, Ajou University, Korea
- B.S: Control and Instrumentation Engineering, Ajou University, Korea
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| | Experience & Service | |
| | Professional Service | - Associate Editor, IEEE Sensors Journal
- Track Chair, Micro and Nano Systems track, IMECE (International Mechanical Engineering Congress and Exposition)
- Program Committee Chair, ASME MEMS Division
- Chair, IMECE Technical Committee, and Fabrication Packaging and Materials Technical Committee, ASME MEMS Division
- Technical Program Committee: IEEE Sensors Conference, SPIE Defense and Security Symposium (MEMS and Nanotechnology), IEEE Sensors Conference, SPIE Defense and Security Symposium (MEMS and Nanotechnology)
- Organizer and Session Chair: Micro and Nano Devices Symposium, ASME International Mechanical Engineering Congress and Exposition, 2005~present, The 1st Metro Area MEMS/NEMS workshop at Stevens Institute of Technology, 2007
- Reviewer: Journals: IEEE Sensors Journal, IEEE/ASME Journal of Microelectromechanical Systems, IEEE EDS Electron Device Letters, IOP Journal of Physics: Condensed Matter, IOP Journal of Physics D: Applied Physics, IOP Journal of Micromechanics and Microengineering, IOP Nanotechnology, IOP Journal of Optics A: Pure and Applied Optics, IOP Measurement Scienece and Technology, Sensors and Actuators A, Micromechatronics, Journal of Sensors and Materials, Optics Communications, International Journal of Optomechatronics, Microfluidics and Nanofluidics; Conferences: IEEE Sensors Conference, ASME International Mechanical Engineering Congress and Exposition, SPIE MOEMS and MEMS Conference Proposals: NSF CAREER panels (Micro and Nano Systems, Biological and Chemical Separation), NASA SBIR Phase I and II, JPL Research and Technology Development, Ireland Science Foundation, Cooperative Grants Program (CGP)-A of the U.S. Civilian Research and Development Foundation (CRDF); ACS Petroleum Research Fund; Projects: Multi Object Spectrometer (MOS) for NASA’s James Webb Space Telescope (JWST)
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| | | Experience | Associate Professor: Stevens Institute of Technology: 2006 – Present Senior Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: 2002 – 2006 Member of Engineering Staff, Task Manager: NASA Jet Propulsion Laboratory: 2001 – 2002
| | General Information | | Dr. Yang is the director of Micro Device Laboratory (MDL). He came from NASA's Jet Propulsion Laboratory, where he was a Senior Member of the Engineering Staff. In recognition of his excellence in advancing the use of MEMS-based actuators for space applications, he received the prestigious Lew Allen Award for Excellence at JPL. Dr. Yang is currently PI/Co-PI on grants from AFOSR, NSF, and NASA SBIR. He is Associate Editor of the IEEE Sensors Journal. | | Appointments | -
- Associate Editor, IEEE Sensors Journal
- Director of Micro Device Laboratory at Stevens
| | Consulting Service | - MEMS valve technology for Rexcorp
- MEMS actuated membrane for POC
- MEMS valve technology for NASA GSFC
- MEMS deformable mirror for TRS Technologies, Inc
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| | Achievements & Professional Societies | |
| | Patents & Inventions | - E.H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated Micropropulsion and Method for Operating the Same”, Currently under review by NASA
- C. P. Search, S. Strauf and E.H. Yang, “Phase Coherent Solid State Electron Gyroscope Array,” U.S. Provisional Patent filed
- N. Gao, H. Wang and E.H. Yang, “A highly efficient cell separation technique using antibody functionalized magnetic nanowires,” U.S. Provisional Patent Application filed
- O. Sul, R. Dutta, and E.H. Yang, “A Nanowire-based Ultra-High Frequency Diode for Solar Energy Harvesting,” U.S. Provisional Patent Application Filed: 5/14/2009, Serial # 61/216,200
- S. Lee and S. S. Lee, and E.H. Yang, “A Planner Vacuum Transistor Based on Graphene Field Emissions,” U.S. Provisional Patent Filed: 5/15/2009, Serial # 61/216,298
- K. Kumar and E.H. Yang, “A High-throughput Local Oxidation Patterning Process,” U.S. Provisional Patent Filed: 3/27/2009, Serial # 61/164,101
- E.H. Yang, D. Choi, S. Bae, and C. Ramsey, “Fabrication of Copper Nanotubes by Electrochemical Deposition, and Copper Nanotubes Made Therefrom,” NASA Case No. NPO-42261-1: Government Owned Invention filed by NASA
- E.H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane for Active Optical Systems” US 7,336,412 B2 US Patent
- E.H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” US 7,268,081 US Patent
- W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Optically Powered And Optically Data-Transmitting Wireless Intraocular Pressure Sensor Device,” US 7,131,945 B2 US Patent
- E.H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 B2 US Patent
| | Honors & Awards | Lew Allen Award for Excellence (2004), JPL: Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for the development of high-pressure, low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for segmented mirror assembly and control for large aperture, space-based telescopes.
NASA ICB Space Act Award (2005), JPL Level C Award (2003), JPL NASA ICB Space Act Award (2003), JPL Level B Award (2001), JPL Class 1 NASA Tech Brief Awards (2001-Present), JPL (28 awards) Research Fellowship of the Japan Society for the Promotion of Science (1996-1998), The University of Tokyo, Japan Summa Cum Laude Honor (1990), Ajou University, Korea
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| | | Professional Societies | Senior Member: The Institute of Electronics and Electrical Engineers (IEEE): Conference Committee, Session Chair American Society of Mechanical Engineers (ASME): Committee Chair, Symposium Chair, Organizer, Session Chair The International Society for Optical Engineering (SPIE): Conference Committee, Session Chair Member: Materials Research Society (MRS) Member: Korean Institute of Electrical Engineering (KIEE)
| | Grants, Contracts & Funds | Air Force Office of Scientific Research - US Army ARDEC
National Science Foundation NASA SBIR Phase I&II - JPL Research and Technology Development
DARPA TTO, Large Aperture Space Surveillance National Reconnaissance Office, Director’s Innovation Initiatives - National Reconnaissance Office
NASA NRA, Astrobiology Science and Technology Instrument Development, Bio/nano Technology Program JPL Director's Research and Development Fund NASA Code R Enabling Concepts and Technologies Program NASA Cross Enterprise Technology Development Program - NASA Gossamer Space Telescope Technology
Caltech President Funding
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| | Selected Publications | |
| Journals
S. W. Lee, S. S. Lee and E. H. Yang. (2009). "A Study on Field Emission Characteristics of Planar Graphene Sheets", Nanoscale Research Letters.
D.S. Choi and E. H. Yang. (2009). "Fabrication of Buried Nanochannels by Transferring", Journal of Sensors and Materials.
K.Shcheglov, X. Jiang, R. Toda, Z. Chang, and E. H. Yang. (2009). "Hybrid Linear Microactuators and Their Control Models for Mirror Shape Correction", Journal of Micro-Nano Mechatronics.
O. Sul ad E. H. Yang. (2009). "A Multi-Walled Carbon Nanotube-Aluminum Bimorph Nanoactuator", Nanotechnology, 20 095502.
Y. Rheem, C. Hangarter, E.-H. Yang, N. V. Myung, and B. Yoo. (2008). "Site-Specific Magnetic Assembly of Ferromagnetic Nanowire", IEEE Transactions on Nanotechnology, 7 251-255.
R. Toda and E. H. Yang. (2007). "Normally-Latched, Large-Stroke, Inchworm Microactuatorv", Journal of Micromechanics and Microengineering, 17 1715-1720.
C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung. (2007). "Hierarchical Magnetic Assembly of Nanowires", IOP Nanotechnology, Most accessed articles in Nanotechnology, Cover issue. 18 (20), 205-305.
E. H. Yang, C. Lee and J. Khodadadi. (2007). "Development of MEMS-Based Piezoelectric Microvalve Technologies – Fabrication, Characterization and Modeling,", Journal of Sensors and Materials, Special Issue on Microvalve, Invited paper. 19 1-18.
C. A. Johnson, J. M. Khodadadi and E. H. Yang,. (2006). "Modeling of Frictional Gas Flow Effects in a Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions", Journal of Micromechanics and Microengineering, 16 2771-2782.
E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine. (Oct 2006). "Thin-Film Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane", IEEE/ASME Journal of Microelectromechanical Systems, 15 (5), 1214-1225.
C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi. (Jun 2006). "Fabrication, Characterization and Computational Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,", IEEE/ASME Journal of Microelectromechanical Systems, 15 (3), 686-696.
Y. Hishinuma and E. H. Yang. (Apr 2006). "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror", IEEE/ASME Journal of Microelectromechanical Systems, 15 (2), 370-379.
| | Conference Proceedings
E. H Yang, S. Strauf, F. Fisher, and D. S. Choi. (Apr 2009). "Carbon-based Nano Devices for Sensors, Actuators and Electronics", Invited Paper, SPIE Defense and Security Symposium, Micro- and Nanotechnology Sensors, Systems, and Applications, Conference 7318 - Proceedings of SPIE Volume 7318, Orlando, FL. 7318.
E. H. Yang. (Apr 2007). "Microactuators for Wavefront Correction in Space", Invited Paper, SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Orlando, FL. 6556.
Presentation/Meeting
P. A. Huang and E. H. Yang. (2009). "MEMS-based Warm Gas Thruster System for CubeSat Orbital Maneuver Applications", Invited Presentation, SPIE Defense and Security Symposium, Space Exploration Technologies II, Conference 7331 - Proceedings of SPIE Volume 7331, Orlando, FL.
E. H. Yang. (Jul 8-12, 2007). "Microfabricated Actuators for Space Applications", Keynote Talk, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK ’07), .
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