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MDL CAPABILITIES

Device Design

Coupled micro-electro-mechanical-optical-fluidic analysis

Photolithography

Mask aligner, spin coater, bake ovens, wet bench, microscope

Device Testing

Probe station, Zyvex nanomanipulator, SEM, AFM, high-magnification microscope

Etch & Deposition

DRIE, XeF2 etcher, wet etch bench, PVD System, ICP Etcher

 

WITH SUPPORT FROM:
Mechanical Engineering Deparment    School of Engineering Science    Nanotechnology Graduate Program
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