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| Patent Number: 6703771 | | Title: A light source with a sealed, light-transmissive tube filled with high pressure gases or high pressure gas mixtures and a microhollow cathode (MHC) discharge capable of excimer production are provided. | | Inventors: Kurt F. Becker, Peter F. Kurunczi, Karl H. Schoenbach | | Abstract: A light source with a sealed, light-transmissive tube filled with high pressure gases or high pressure gas mixtures and a microhollow cathode (MHC) discharge capable of excimer production are provided. | | Download Patent |
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